Applicable to
various materials
and shapes

Easy to operate
precursor
evaporator

Manufacture of SiOx,
SiNx, TiOx, TiNx,
AlOx, Transparent
Conducting Oxide
(TCO) Etc

Possible to coat
in an organic
thin film

Self-diagnosis
enable highly
stable
atmospheric-pre
ssure plasma

Interface with
external devices
and real-time
plasma monitoring

Apply optimized
power supply,
high frequency
transformers and
plasma hardware

Possible to operate
continuous
operation and
ON/OFF operation